Plasma-Therm LLC

Plasma-Therm is a global manufacturer of advanced plasma-processing equipment, providing etch, deposition, and plasma dicing technologies used in semiconductor packaging, solid-state lighting, power, data storage, renewable energy, MEMS, nanotechnology, photonics, and wireless communication markets.

Plasma-Therm’s VERSALINE platform is the workhorse for a variety of applications in specialty semiconductor markets. The platform's modular design allows flexible configuration of substrate handling and technologies that address the wide range of customer requirements.

Plasma-Therm’s Singulator® systems bring the precision and speed of plasma dicing to chip-packaging applications. Manufacturers, academic and governmental institutions depend on Plasma-Therm equipment, designed with “lab-to-fab” flexibility to meet the requirements of both R&D and volume production.

Plasma-Therm's products have been adopted globally and have earned their reputation for value, reliability, and world-class support. Named the #1 Etch Equipment Supplier in 2019, Plasma-Therm has more than two decades of awards in the VLSIresearch Customer Satisfaction Survey, including the highest score ever earned by a semiconductor equipment company.